The JEOL JIB-4700 Z Dual Beam FIB-SEM utilises a gallium ion source for the focussed ion beam (FIB), in addition to a Schottky FEG. It also features a newly developed cryo system. This microscope is used to create lamellae for electron tomography and volume electron microscopy.
SEM Beam:
- Accelerating voltage of 0.1 to 30 kV
- Resolution up to 1.2 nm
- Magnification of 20 to 1000000x
FIB Beam:
- Accelerating voltage of 1 to 30 kV
- Resolution up to 4 nm
- Magnification of 50 to 1000000x