Based on phase modulation technology, the UVISEL Plus ellipsometer provides a powerful optical design to continuously cover the spectral range from 190 to 2100 nm. The phase modulation technology characterizes polarization changes at high frequency (50 kHz), and without any mechanical movement.

The Horiba UVISEL Plus is capable of measuring:

• Thin film thickness from less than a nanometer to 50 micrometers
• Surface and interface roughness
• Optical constants (n,k) for isotropic, anisotropic and graded films
• Derived optical data such as: absorption coefficient α, optical bandgap (E_g), permittivity

Specifications:

• Spectral range: UV-VIS from 190 to 885 nm │NIR extension option up to 2100 nm
• Detection: High resolution monochromators coupled to sensitive detectors
• Motorised sample stage: XY 200 x 200mm, manual height (4mm) and tilt adjustment
• Automatic large area mapping
• Automatic goniometer: Automatically adjustable angle from 45° to 90° by step of 0.01° 

 Accuracy: Psi= 45°±0.01° and Delta=0°±0.01° measured in straight-through air configuration 1.5 – 5.3 eV

 Repeatability: NIST 1000Å SiO2/Si (190-2100 nm): d ± 0.1 % – n(632.8nm) ± 0.0001

The UVISEL Plus is controlled by the DeltaPsi2 software platform. DeltaPsi2 provides a complete measurement and modelling package allowing to address both routine and advanced thin film applications.