Location: King’s Building K-2.71

The TESCAN MIRA3 is a high performance FEG-SEM system

• Beam deceleration technology (BDT) for high resolution imaging and high surface sensitivity at very low kV
• High resolution performance - 1.0 nm at 30kV
• Variable pressure operation
• SE detector (Everhart-Thornley Type)
• Retractable BSE detector

System is built to house a DELMIC SPARC CL detector. The system is designed to optimally collect and detect cathodoluminescence emission, enabling fast and sensitive material characterization at the nanoscale. The SPARC is capable of detecting in both the IR and NIR-UVvis Spectral ranges.